Pagès, XavierXavierPagèsVan der Jeugd, KeesKeesVan der JeugdKuznetsov, VladimirVladimirKuznetsovGranneman, ErnstErnstGrannemanLauwers, AnneAnneLauwersLindsay, RichardRichardLindsay2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9381The effect of ramp rate - short process time and partial reactions on Cobalt and Nickel silicide formationProceedings paper