Hantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeTsigkourakos, MenelaosMenelaosTsigkourakosArstila, KaiKaiArstilaMoussa, AlainAlainMoussaEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20778Nanoscopic controlled material removal using diamond tipsOral presentation