Van de Kerckhove, KevinKevinVan de KerckhoveBarr, MaïssaMaïssaBarrSantinacci, LionelLionelSantinacciVereecken, PhilippePhilippeVereeckenDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernier2021-10-262021-10-2620181477-9226https://imec-publications.be/handle/20.500.12860/32020The transformation behaviour of "alucones" deposited by molecular layer deposition, in nanoporous Al2O3 layersJournal articlehttps://pubs.rsc.org/en/content/articlelanding/2018/dt/c8dt00723c#!divAbstract