Nuytten, ThomasThomasNuyttenJamal, Muhammad TahirMuhammad TahirJamalHantschel, ThomasThomasHantschelBogdanowicz, JanuszJanuszBogdanowiczSchulze, AndreasAndreasSchulzeFavia, PaolaPaolaFaviaBender, HugoHugoBenderDe Wolf, IngridIngridDe WolfVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27084Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopyOral presentation