Vereecken, PhilippePhilippeVereeckenChiodarelli, NicoloNicoloChiodarelliRomo Negreira, AinhoaAinhoaRomo NegreiraSantini, ClaudiaClaudiaSantiniPeys, NickNickPeysCott, DaireDaireCottvan der Veen, MarleenMarleenvan der VeenVerhulst, AnneAnneVerhulstArstila, KaiKaiArstilaGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16471Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECDMeeting abstracthttp://ecsmeet7.peerx-press.org/ms_files/ecsmeet7/2008/12/19/00002286/00/2286_0_art_1_kc4gph.pdf