Polyimide-ALD-polyimide layers as hermetic encapsulant for implants

Schaubroeck, DavidDavidSchaubroeckVerplancke, RikRikVerplanckeCauwe, MaartenMaartenCauweCuypers, DieterDieterCuypersBaumans, KimKimBaumansOp de Beeck, MaaikeMaaikeOp de Beeck2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29386Polyimide-ALD-polyimide layers as hermetic encapsulant for implantsProceedings paper