A new scalable self-aligned dual-bit split-gate charge trapping memory device

Breuil, LaurentLaurentBreuilHaspeslagh, LucLucHaspeslaghBlomme, PieterPieterBlommeWellekens, DirkDirkWellekensDe Vos, JoeriJoeriDe VosLorenzini, MartinoMartinoLorenziniVan Houdt, JanJanVan Houdt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10151A new scalable self-aligned dual-bit split-gate charge trapping memory deviceJournal article