Oniki, YusukeYusukeOnikiKenis, KarineKarineKenisWostyn, KurtKurtWostynAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteyns2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35672Isotropic etches for nanosheet device integration - Wet or dry?Meeting abstract