TSV-assisted hybrid FinFET CMOS - Silicon photonics technology for high density optical I/O

Guermandi, DavideDavideGuermandiBogaerts, LieveLieveBogaertsRakowski, MichalMichalRakowskiBan, YoojinYoojinBanDe Heyn, PeterPeterDe HeynPantano, NicolasNicolasPantanoBex, PieterPieterBexDe Coster, JeroenJeroenDe CosterHe, JunwenJunwenHePhommahaxay, AlainAlainPhommahaxayBalakrishnan, SadhishkumarSadhishkumarBalakrishnanDemeurisse, CarolineCarolineDemeurisseBertheau, JulienJulienBertheauRebibis, Kenneth JuneKenneth JuneRebibisNolmans, PhilipPhilipNolmansSun, XiaoXiaoSunSrinivasan, AshwynAshwynSrinivasanVan Huylenbroeck, StefaanStefaanVan HuylenbroeckLardenois, SebastienSebastienLardenoisMiller, AndyAndyMillerAbsil, PhilippePhilippeAbsilVerheyen, PeterPeterVerheyenVelenis, DimitriosDimitriosVelenisPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan Campenhout2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33065TSV-assisted hybrid FinFET CMOS - Silicon photonics technology for high density optical I/OProceedings paperhttps://ieeexplore.ieee.org/document/9125718