Mertens, PaulPaulMertensDevriendt, KatiaKatiaDevriendtZeng, AndrewAndrewZengFyen, WimWimFyenBearda, TwanTwanBeardaVos, RitaRitaVosKenis, KarineKarineKenisArnauts, SophiaSophiaArnautsSchmolke, R.R.SchmolkeWagner, P.P.WagnerHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4989Process inspection by laser beam scanning of unpatterned wafersProceedings paper