Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency

Kalicinski, StanislawStanislawKalicinskiWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-172021-10-1720080026-2714https://imec-publications.be/handle/20.500.12860/13937Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequencyJournal article