Relation between microstructure and 2DEG properties in AlGaN/GaN structures

Van Daele, B.B.Van DaeleVan Tendeloo, G.G.Van TendelooGermain, MarianneMarianneGermainLeys, MaartenMaartenLeysBougrioua, Z.Z.BougriouaMoerman, IngridIngridMoerman2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6914Relation between microstructure and 2DEG properties in AlGaN/GaN structuresMeeting abstract