Origins and implications of increased channel hot carrier variability in nFinFETs

Kaczer, BenBenKaczerFranco, JacopoJacopoFrancoCho, Moon JuMoon JuChoGrasser, TiborTiborGrasserRoussel, PhilippePhilippeRousselTyaginov, StanislavStanislavTyaginovBina, MarkusMarkusBinaWimmer, Y.Y.WimmerProcel, L. M.L. M.ProcelTrojman, LionelLionelTrojmanCrupi, FeliceFeliceCrupiPitner, GregoryGregoryPitnerPutcha, VamsiVamsiPutchaWeckx, PieterPieterWeckxBury, ErikErikBuryJi, Z.Z.JiDe Keersgieter, AnAnDe KeersgieterChiarella, ThomasThomasChiarellaHoriguchi, NaotoNaotoHoriguchiGroeseneken, GuidoGuidoGroesenekenThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25445Origins and implications of increased channel hot carrier variability in nFinFETsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7112706