Aoulaiche, MarcMarcAoulaicheKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselHoussa, MichelMichelHoussaDe Gendt, StefanStefanDe GendtMaes, HermanHermanMaesGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13308Impact of nitridation on recoverable and permanent NBTI degradation in high-k/metal-gate pMOSFETsOral presentation