Lauerhaas, JeffJeffLauerhaasWu, Y.Y.WuXu, KaidongKaidongXuVereecke, GuyGuyVereeckeVos, RitaRitaVosKenis, KarineKarineKenisMertens, PaulPaulMertensNicolosi, T.T.NicolosiHeyns, MarcMarcHeyns2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6519Sub 100nm particle removal with deionized water and a megasonic frequency of 835kHzProceedings paper