Focus spot reduction by brush scrubber cleaning

Pacco, AntoineAntoinePaccoKesters, ElsElsKestersSimms, IhsanIhsanSimmsNafus, KathleenKathleenNafusVandereyken, JelleJelleVandereykenYonekawa, HirokiHirokiYonekawa2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24354Focus spot reduction by brush scrubber cleaningProceedings paperhttp://www.scientific.net/SSP.219.276