Wu, Ming FangMing FangWuVantomme, AndreAndreVantommePattyn, H.H.PattynLangouche, G.G.LangoucheBender, HugoHugoBender2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1667Ion beam synthesis of heteroepitaxial erbium silicide layersJournal article