A way to integrate multiple block layers for middle of line contact patterning

Kunnen, EddyEddyKunnenDemuynck, StevenStevenDemuynckBrouri, MohandMohandBrouriBoemmels, JuergenJuergenBoemmelsVersluijs, JankoJankoVersluijsRyckaert, JulienJulienRyckaert2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25502A way to integrate multiple block layers for middle of line contact patterningProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2209862