Adelmann, ChristophChristophAdelmannWen, Liang GongLiang GongWenDutta, ShibeshShibeshDuttaBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24915Alternative metals for advanced interconnectsOral presentation