Lisoni, JuditJuditLisoniJohnson, J.J.JohnsonEveraert, Jean-LucJean-LucEveraertParaschiv, VasileVasileParaschivBoullart, WernerWernerBoullartMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersCaputa, ConcettaConcettaCaputaCasella, P.P.CasellaZambrano, R.R.ZambranoVecchio, EmmaEmmaVecchioMonchoix, HervéHervéMonchoixVan Autryve, LucLucVan Autryve2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7812Spacers alternatives for integration of 3D stacked SBT FeCAPsJournal article