Andreas, MichaelMichaelAndreasWostyn, KurtKurtWostynWada, MasayukiMasayukiWadaJanssens, TomTomJanssensKenis, KarineKarineKenisBearda, TwanTwanBeardaMertens, PaulPaulMertens2021-10-172021-10-1720091662-9779https://imec-publications.be/handle/20.500.12860/14901High velocity aerosol cleaning with organic solvents: particle removal and substrate damageJournal articlewww.scientific.net