The impact of hyper NA immersion lithography to reticles and design

Ronse, KurtKurtRonseCheng, ShauneeShauneeChengErcken, MoniqueMoniqueErckenLeunissen, PeterPeterLeunissenMaenhoudt, MireilleMireilleMaenhoudtVandenberghe, GeertGeertVandenbergheYoshizawa, MasakiMasakiYoshizawa2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11123The impact of hyper NA immersion lithography to reticles and designProceedings paper