David, M.L.M.L.DavidBarbot, J.F.J.F.BarbotRousselet, S.S.RousseletPailloux, F.F.PaillouxBabonneau, D.D.BabonneauBeaufort, M.F.M.F.BeaufortPizzagali, L.L.PizzagaliDrouet, M.M.DrouetSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13587Extended defects created by light ion implantation in GermaniumProceedings paper