Atomic Layer Deposition of Lithium Borate and Lithium Borophosphate for Lithium-Ion Batteries

Verhelle, TippiTippiVerhelleDhara, ArpanArpanDharaHenderick, LowieLowieHenderickMinjauw, MatthiasMatthiasMinjauwDe Taeye, LouisLouisDe TaeyeMeersschaut, JohanJohanMeersschautDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernier2025-01-222025-01-222025-JAN 10897-4756WOS:001397193500001https://imec-publications.be/handle/20.500.12860/45102Atomic Layer Deposition of Lithium Borate and Lithium Borophosphate for Lithium-Ion BatteriesJournal article10.1021/acs.chemmater.4c02747WOS:001397193500001SOLID-STATE ELECTROLYTESLISTABILITYPHOSPHATETIO2