Baranov, GlebGlebBaranovMilenin, AlexeyAlexeyMileninBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24968Roughness study of a template for hetero-integrated FinFETMeeting abstracthttp://pesm-conference.org/files/2015_abstractbook.pdf