El Otell, ZiadZiadEl OtellMarinov, DaniilDaniilMarinovBowden, MarkMarkBowdenSamara, VladimirVladimirSamarade Marneffe, Jean-FrancoisJean-Francoisde MarneffeVerdonck, PatrickPatrickVerdonckBraithwaite, NicholasNicholasBraithwaite2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22304Development of a novel wafer probe for in-situ measurementsOral presentation