Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence SiGe

Huyghebaert, CedricCedricHuyghebaertBrijs, BertBertBrijsVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5356Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence SiGeOral presentation