Novel cost-effective approach to produce nano-sized contact openings in an aluminum oxide passivation layer up to 30 nm thick for CIGS solar cells

Kandybka, IrynaIrynaKandybkaBirant, GizemGizemBirantde Wild, JessicaJessicade WildBuldu, Dilara GokcenDilara GokcenBulduKohl, ThierryThierryKohlThiruvallur Eachambadi, RaghaRaghaThiruvallur EachambadiBrammertz, GuyGuyBrammertzManca, Jean, VJean, VMancaMeuris, MarcMarcMeurisPoortmans, JefJefPoortmansVermang, BartBartVermang2022-02-232022-02-2320210022-3727WOS:000631361600001https://imec-publications.be/handle/20.500.12860/39031Novel cost-effective approach to produce nano-sized contact openings in an aluminum oxide passivation layer up to 30 nm thick for CIGS solar cellsJournal article10.1088/1361-6463/abed09WOS:000631361600001REAR SURFACE PASSIVATIONEFFICIENCYCU(IN