Buca, DDBucaMinamisawa, R AR AMinamisawaTrinkaus, HHTrinkausHollander, BBHollanderMantl, SSMantlLoo, RogerRogerLooNguyen, DuyDuyNguyen2021-10-172021-10-1720090003-6951https://imec-publications.be/handle/20.500.12860/15056Relaxation of strained pseudomorphic SixGe1-x layers on He-implanted Si/d-Si:C/Si(100) substratesJournal article