RPN oxynitride gate dielectrics for 90nm low power CMOS applications

Veloso, AnabelaAnabelaVelosoJurczak, GosiaGosiaJurczakCubaynes, FlorenceFlorenceCubaynesRooyackers, RitaRitaRooyackersMertens, SofieSofieMertensRothschild, AudeAudeRothschildSchaekers, MarcMarcSchaekersAl-Shareef, H.H.Al-ShareefMurto, R.R.MurtoDachs, CharlesCharlesDachsBadenes, GonçalGonçalBadenes2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/7009RPN oxynitride gate dielectrics for 90nm low power CMOS applicationsProceedings paper