Detailed analysis of transport properties of FinFETs through Y-function method: effects of substrate orientation and strain

Ribeiro, ThalesThalesRibeiroSimoen, EddyEddySimoenClaeys, CorCorClaeysMartino, JoaoJoaoMartinoPavanello, MarceloMarceloPavanello2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25818Detailed analysis of transport properties of FinFETs through Y-function method: effects of substrate orientation and strainProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7298145