Vantomme, AndréVandervorst, WilfriedHuyghebaert, CedricCedricHuyghebaert2026-05-042026-05-042006-12-06https://imec-publications.be/handle/20.500.12860/59311Oxygen beam interactions during sputter profiling of Si, SiGe and Ge substratesPHD thesis