Capacitance measurements and K-value extractions of low-K films

Ciofi, IvanIvanCiofiBaklanov, MikhaïlMikhaïlBaklanovTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyer2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/16870Capacitance measurements and K-value extractions of low-K filmsJournal articlehttp://dx.doi.org/10.1016/j.mee.2010.04.014