Vandervorst, WilfriedWilfriedVandervorstTrenkler, ThomasThomasTrenklerDe Wolf, PeterPeterDe WolfClarysse, TrudoTrudoClarysseHellemans, L.L.Hellemans2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2264ULSI-device characterization using conductive scanning probesOral presentation