Singh, ArjunArjunSinghKnaepen, WernerWernerKnaepenSayan, SafakSafakSayanEl Otell, ZiadZiadEl OtellChan, BTBTChanMaes, JanJanMaesGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25918Impact of sequential infiltration synthesis on pattern fidelity of DSA linesProceedings paperhttps://doi.org/10.1117/12.2086091