Phase analysis and thermal stability of thin films synthesized via solid state reaction of Ni with Si1-xGex substrate

Peter, AntonyAntonyPeterWitters, ThomasThomasWittersDutta, ShibeshShibeshDuttaHikavyy, AndriyAndriyHikavyyVaesen, IngeIngeVaesenVan Elshocht, SvenSvenVan ElshochtSchaekers, MarcMarcSchaekers2021-10-232021-10-2320160167-9317https://imec-publications.be/handle/20.500.12860/27131Phase analysis and thermal stability of thin films synthesized via solid state reaction of Ni with Si1-xGex substrateJournal articlehttp://www.sciencedirect.com/science/article/pii/S016793171530054X