Jin, YouseungYouseungJinWaldron, NiamhNiamhWaldronOrzali, TommasoTommasoOrzaliCaymax, MattyMattyCaymaxHoriguchi, NaotoNaotoHoriguchiPark, TaeHyunTaeHyunParkJiang, ZhimingZhimingJiangHan, SangHyunSangHyunHan2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20869Optical metrology of thickness and indium content of epitaxial InxGa1-xAs layers on Si substratesProceedings paper