Impact of repetitive and random surface morphologies on the ripple formation on ion bombarded SiGe-surfaces

Sarkar, SubhenduSubhenduSarkarVan Daele, BennyBennyVan DaeleVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172008-081367-2630https://imec-publications.be/handle/20.500.12860/14426Impact of repetitive and random surface morphologies on the ripple formation on ion bombarded SiGe-surfacesJournal article