Maenhoudt, MireilleMireilleMaenhoudtVangoidsenhoven, DizianaDizianaVangoidsenhovenPollentier, IvanIvanPollentierRonse, KurtKurtRonseLepage, MurielMurielLepageStruyf, HerbertHerbertStruyfVan Hove, MarleenMarleenVan Hove2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5463Lithography aspects of dual damascene interconnect technologyProceedings paper