Application of 3D X-ray microscopy for 3D IC process development

Wang, TengTengWangDe Wolf, IngridIngridDe WolfGu, AllenAllenGuEstrada, RaleighRaleighEstrada2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27575Application of 3D X-ray microscopy for 3D IC process developmentProceedings paper