Croes, KristofKristofCroesCiofi, IvanIvanCiofiKocaay, DenizDenizKocaayTokei, ZsoltZsoltTokeiBoemmels, JuergenJuergenBoemmels2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23691Effect of line-overlay and via-misalignment on dielectric reliability for different patterning schemesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6861118&contentType=Conference+Publications