Zahedmanesh, HoumanHoumanZahedmaneshGonzalez, MarioMarioGonzalezCiofi, IvanIvanCiofiCroes, KristofKristofCroesBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-232021-10-2320160167-9317https://imec-publications.be/handle/20.500.12860/27646Stress analysis of airgaps under process-induced thermomechanical loadsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931716300612