Development of a novel metal-insulator-semiconductor planar capacitor test structure and its applications in Cu interconnect research

Claeys, CorneelZhao, LieLieZhao2026-06-012026-06-012012-08https://imec-publications.be/handle/20.500.12860/59502Development of a novel metal-insulator-semiconductor planar capacitor test structure and its applications in Cu interconnect researchPHD thesis