Tilmans, HarrieHarrieTilmansDe Coster, JeroenJeroenDe CosterHelin, PhilippePhilippeHelinCherman, VladimirVladimirChermanJourdain, AnneAnneJourdainDe Moor, PietPietDe MoorVandevelde, BartBartVandeveldePham, NgaNgaPhamZekry, JosephJosephZekryWitvrouw, AnnAnnWitvrouwDe Wolf, IngridIngridDe Wolf2021-10-202021-10-2020120026-2714https://imec-publications.be/handle/20.500.12860/21609MEMS packaging and reliability: An undividable coupleJournal articlehttp://dx.doi.org/10.1016/j.microrel.2012.06.029