High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistors

Pondini, AndreaAndreaPondiniEyben, PierrePierreEybenWouters, LennaertLennaertWoutersHantschel, ThomasThomasHantschelMitard, JeromeJeromeMitardVerhulst, AnneAnneVerhulst2025-05-142025-05-142025-03-31Xhttps://imec-publications.be/handle/20.500.12860/45663High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistorsMeeting abstractMaterials scienceSSRMScanning Spreading Resistance MicroscopyNSFETGAA