De Gryse, O.O.De GryseClauws, P.P.ClauwsVanhellemont, J.J.VanhellemontLebedev, O.O.LebedevVan Landuyt, J.J.Van LanduytSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6188Chemical and structural characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopy and transmission electron microscopyProceedings paper