ESD Challenges in sub-10nm CMOS technologies

Chen, Shih-HungShih-HungChenLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzHellings, GeertGeertHellingsBoschke, RomanRomanBoschkeHoriguchi, NaotoNaotoHoriguchi2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26436ESD Challenges in sub-10nm CMOS technologiesProceedings paper