Impact of source/drain contacts formation of self-aligned amorphous-IGZO TFTs on their negative-bias-illumination-stress stabilities

Nag, ManojManojNagSteudel, SoerenSoerenSteudelSmout, SteveSteveSmoutBhoolokam, AjayAjayBhoolokamGenoe, JanJanGenoeCobb, BrianBrianCobbKumar, AbhishekAbhishekKumarGroeseneken, GuidoGuidoGroesenekenHeremans, PaulPaulHeremans2021-10-222021-10-2220151071-0922https://imec-publications.be/handle/20.500.12860/25685Impact of source/drain contacts formation of self-aligned amorphous-IGZO TFTs on their negative-bias-illumination-stress stabilitiesJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/jsid.351/abstract