Iacopi, FrancescaFrancescaIacopiBaklanov, MikhaïlMikhaïlBaklanovSleeckx, ErikErikSleeckxConrad, T.T.ConradBender, HugoHugoBenderMeynen, HermanHermanMeynenMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6417Properties of porous HSQ-based films capped by plasma enhanced chemical vapor deposition dielectric layersJournal article