Investigation of intrinsic stress effects in cantilever structures

Hollauer, ChristianChristianHollauerCeric, HajdnHajdnCericVan Barel, GregGregVan BarelWitvrouw, AnnAnnWitvrouwSelberherr, S.S.Selberherr2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12303Investigation of intrinsic stress effects in cantilever structuresProceedings paper